自动特征分析套件（ACS）测试系统

主要特点及优点

Fully customizable systems that can include:

Configurations that range from bench-top to full-height racks of instrumentation

Wafer level and cassette level automation

Compatibility with popular semi- and fully-automatic wafer probers

Test setup tightly integrated with wafer setup

Interactive prober control for setup and analysis

Binning and wafer mapping

Interactive graphical results displayed at both test setup and cassette level review

Configurable, real time results plotted during automation

Report generation and summary tool

Integrated test script development tools

Extensive parametric test library for both Series 2600 and Model 4200-SCS

ACS integrated test systems are highly configurable, instrument based systems for semiconductor characterization at the device, wafer, or cassette level; offering unique measurement capability with powerful and flexible automation oriented software. Keithley's proven instruments and measurements are the core of the system, which is controlled by the ACS (Automated Characterization Suite) software. Our ACS systems fill the gap between interactive laboratory based tools and high cost and high throughput production test tools.

应用

Advanced Reliability (WLR) Testing

Multi-Site Parallel Wafer/Die Sort

SMU-Per-Pin WLR Testing

Automated Device Characterization

Hot Carrier Injection (HCI)

Gate Oxide Integrity (TDDB, VRAMP, JRAMP

Isothermal Electromigration

Bias Temperature Instability (NBTI and PBTI)